Parylene Nanomaterials | Other Materials | |||||||||
ASTM Test Records | Parylene C | Parylene N | Parylene F | Parylene AF4 | Test Method (ASTM) | ER | SR | UR | AR UV | |
Dielectric strength DC(V/mil) | 5600 | 7000 | 5500 | 5400 | D149 | 900-1000 | 1100-2000 | 1400-3000 | 1200-2000 | |
Volume resistivity Ω.Cm 23*C50%RH | 6-8X1016 | 1.4X1017 | 2X1017 | 2X1017 | D257 | 1012-17 | 1015-16 | 1011-15 | 1013-14 | |
Surface resistivity ΩSurface | 1014 | 1013 | 5X1035 | 1015 | D257 | 1013 | 1013 | - | 1014 | |
Dielectric constant | 60Hz | 3.15 | 2.65 | 2.25 | 2.21 | D150 | 3.5-5.0 | 2.7-3.1 | 5.7-7.8 | 3-4 |
lKHz | 3.10 | 2.65 | 2.1 | 2.20 | D150 | 3.S-4.5 | 262.7 | 5.4-7.6 | 2.5-5 | |
1MHz | 2.95 | 2.65 | 2.16 | 2.17 | D150 | 3.3-4.0 | 2.6-2.7 | 4.2-5.2 | 3-4 | |
Dissiption factor | 60Hz | 0.02 | 0.0002 | 0.0002 | <0.0002 | D150 | 0.002-0.01 | 0.001-0.007 | 0.015-0.05 | 0.2-0.4 |
lKHz | 0.019 | 0.0002 | 0.0020 | 0.0020 | D150 | 0.002-0.02 | 0.001-0.005 | 0.04-0.06 | 0.02-0.02 | |
1MHz | 0.013 | 0.0006 | 0.0010 | 0.0010 | D150 | 0.03-0.05 | 0.001-0.002 | 0.05-0.07 | 0.035-0.056 | |
1GHz | 0.0043 | - | - | - | - | - | - | - | - | |
10GHz | 0.0032 | - | - | - | - | - | - | - | - | |
Tensile modulus Mpa | 3200 | 2400 | - | 3000 | - | 2400 | 720 | 80-800 | 480 | |
Tensile strength Mpa | 70 | 45 | 52 | 55 | D882 | 28-91 | 5.6-7 | 1.13-70 | 32-77 | |
Elongtion at break % | 200 | 20-250 | 200 | 200 | D882 | 3-6 | 100 | 100-1000 | 3-85 | |
Water absortion %24 | <0.1 | <0.1 | <0.009 | <0.01 | D570 | 0.08-0.15 | 0.12 (Seven Days) | 0.02-0.45 | - | |
Rockwell hardness | R80 | R85 | - | R122 | D785 | M80-110 | 40-45 HS | 10A-25DHS | H-2H | |
Pencil hardness | 2H | 3B | - | - | JISK 5600-5-4 | - | - | - | ||
Coefficient of friction | static | 0.29 | 0.25 | 0.14 | 0.15 | D1894 | - | 1.0 | - | |
dynamic | 0.29 | 0.25 | 0.13 | 0.13 | D1894 | - | 1.0 | - | ||
Melting point °C | 290 | 420 | >460 | >500 | D3417 | Solidify | Solidify | 170 or Solidify | ||
Temperature in the air °C | -200°~120° | -200°~120° | -200°~280° | 450° | - | -64°~199° | -45°~110° | -59°~137° | ||
Linear coefficient of expansint 25°C 10-5/°C | 3.5 | 6.9 | 3.6 | 4.5 | - | 4.565 | 25-30 | 10-20 | 0.5-15 | |
Thermal conductivity 10-4 Cal/cm.s/C | 2.0 | 3.0 | 0.096 | 0.096 | - | 4-5 | 3.5-7.5 | 5.0 | 36 | |
Specific heat 20°C | 0.17 | 0.2 | - | 1.04 | - | 0.25 | - | 0.42 | - | |
Water vapor transmission 37°C 90% RH g.mil/100in2.d | 0.21 | 1.5 | <0.009 | 0.32 | - | 6.6 | -220 | 20.2 | 27.8 |
Gas permeability cm3-mil/100* | Parylene C | Parylene N |
N2 | 0.95 | 7.7 |
O2 | 7.1 | 30 |
CO2 | 7.7 | 214 |
H2S | 13 | 795 |
CL2 | 11 | 1.890 |
CO2 | 0.35 | 74 |
Water vapor transmission in 2-24 hours in the 23℃ in atmospheric pressure | 0.14 | 1.5 |
Thermal Properties | ||
Fusing points(°C) | 290 | 410 |
Linear expansion coefficient(10-5/°C) | 3.5 | 6.9 |
Heat conductivity coefficient(cm2°C /cm) | 2.0 | 3.0 |
Physical and mechanical tests | ||
Tensile strength PSI | 10,000 | 6,500 |
Tensile modulus MPA | 69 | 45 |
Yield strength PSI | &000 | 6,300 |
Elongation at Yield MPA | 3,200 | 2,400 |
Elongation at break% | 200 | 40 |
Density g/cm3 | 1.289 | 1.110 |
Friction coeffcient(static) | 0.29 | 0.25 |
Friction coeffcient(dynamic) | 0.29 | 0.25 |
Water absorption%(24 hours) | 0.06 | 0.01 |
Friction coefficient(dynamic) | 1.639 | 1.661 |
Solvent resistanc 0.5-1.5 mil film immersed in various solvents in the room temperature | ||
Isopropanol | 0.1 | 0.3 |
Isooctane | 0.4 | 0.2 |
Pyridine | 0.5 | 0.2 |
Mixed xylenes | 2.3 | 1.4 |
Trichloro ethylene | 0.8 | 0.5 |
Chlorobenzene | 1.5 | 1.1 |
Dichlorobenzene | 3.0 | 0.2 |
Trichlorotrifluoroethane | 0.2 | 0.2 |
Acetone | 0.9 | 0.3 |
Pentanedione | 1.2 | 0.6 |
DI | 0 | 0 |
Insulation resistance (Ohm)MIL-STD-202 Method 302
Parylene Thickness(in) | Initial measurement 23℃ 50% | Precycling 23 ℃ 90% RH Cycling3 | Cycling 3 Step Five 65℃ 90%RH | Cycling 7 Step Five 65℃ 90%RH | Cycling10 Step Five 65℃ 90%RH | Cycling10 Step SEVEN 25℃ 90%RH |
0.002 | 2.0X1014 | 1.8X1013 | 2.3X1012 | 2.5X1011 | 1.4X1011 | 7.5X1012 |
0.0015 | 5.0X1014 | 2.4X1013 | 8.6X1011 | 1.9X1011 | 1.1X1011 | 5.2X1012 |
0.001 | 2.0X1014 | 9.2X1012 | 8.1X1011 | 3.4X1011 | 1.3X1011 | 6.3X1012 |
0.0005 | 5.0 X 1014 | 2.3X1013 | 4.1X1012 | 2.4X1011 | 1.1X1011 | 4.7X1012 |
0.0003 | 5.0 X1014 | 2.7X1013 | 4.4X1012 | 9.0X1010 | 4.7X1010 | 2.9X1012 |
0.0001 | 5.0X1014 | 3.2X1010 | 1.3X1011 | 1.1X1011 | 6.4X1010 | 2.3X1012 |
Isolation of gas and moisture | ||||||||
Gas permeablity in 25℃ {cm3(STP)-mil} (100in2/d-atm) | 37℃ 90%RH g—mil/100in2 d | |||||||
H2 | N2 | O2 | CO2 | SO2 | H2S | CL2 | ||
Parylene C | 110 | 1.0 | 7.2 | 7.7 | 11 | 13 | 0.35 | 0.21 |
Parylene N | 540 | 7.7 | 39 | 214 | 1890 | 795 | 74 | 1.50 |
ER | 110 | 4 | 5-10 | 8 | - | - | - | 6.6 |
SR | 45000 | - | 50000 | 300000 | - | - | - | 220 |
UR | - | 80 | 200 | 3000 | - | - | - | 20.2 |
AR/UV | - | 152 | 716 | 1433 | - | - | - | 27.8 |
Resistance to acid and alkali corrosive 0.5-1.5 film thickness variation immersed in various solvents in the room temperature for 90 minutes (%) Infrared method
Reagent | Concentration | Praylene D(%) | Praylene N(%) | Praylene C(%) |
HCL | 10% | 0.1 | 0.0 | 0.0 |
Concentrated hydrochloric acid | 37% | 0.5 | 0.2 | 0.0 |
Sulfate acid | 10% | 0.2 | 0.1 | 0.3 |
Concentrated sulfuric acid | 95-98% | 0.8 | 0.2 | 0.4 |
Nitric acid | 10% | 0.2 | 0.1 | 0.1 |
Concentrated nitric acid | 71% | 0.5 | 0.2 | 0.2 |
Chromic acid | 10% | 0.1 | 0.1 | 0.1 |
Concentrated chromic acid | 74% | 0.2 | 0.3 | 0.0 |
NAOH Strong base(NaOH) | 10% | 0.1 | 0.1 | 0.0 |
NH4OH Weak base (NH4OH) | 10% | 0.1 | 0.3 | 0.2 |
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